Ultraviolet laser removal of small metallic particles from silicon wafers

Optics and Lasers in Engineering

Volumn 38, Issue 6, 2002, Pages 405-415

  Curran, C ^a   Lee, J M ^b   Watkins, K G ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b Laser Application Group   (South Korea)

Author keywords

Adhesion force; Cleaning force; Laser cleaning; Particle removal

Indexed keywords

ADHESION; HARMONIC GENERATION; LASER APPLICATIONS; LIGHT SCATTERING; SILICON WAFERS; ULTRAVIOLET RADIATION;

ULTRAVIOLET LASERS;

LASER OPTICS;

EID: 0036884245     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(02)00022-2     Document Type: Article

References (22)