The influence of thermal annealing on the electronic defect states in nanocrystalline CVD diamond films

Physica Status Solidi (A) Applications and Materials Science

Volumn 205, Issue 9, 2008, Pages 2158-2162

  Remes, Z ^a   Kromka, A ^a   Potmesil, J ^a   Vanecek, M ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLITUDE MODULATED; CVD DIAMOND FILMS; ELECTRONIC DEFECTS; FOURIER-TRANSFORM; HYDROGEN PLASMAS; INSULATING SUBSTRATES; IONIZATION THRESHOLD ENERGIES; LOW TEMPERATURES; NANOCRYSTALLINE; NANOCRYSTALLINE DIAMOND FILMS; NCD FILMS; OPTICAL ABSORPTIONS; OPTICAL SPECTRAL RANGES; OPTICAL TRANSMITTANCES; PHOTOCURRENT SPECTROSCOPIES; PHOTOIONIZATION CROSS-SECTIONS; PHOTOTHERMAL DEFLECTION SPECTROSCOPIES; STEP SCANS; SURFACE CONDUCTIVITIES; THERMAL ANNEALING; UV PHOTOSENSITIVITIES;

ABSORPTION; ABSORPTION SPECTROSCOPY; ANNEALING; CHEMICAL VAPOR DEPOSITION; CONCENTRATION (PROCESS); DIAMONDS; ELECTRIC CONDUCTIVITY; ELECTROMAGNETIC WAVE ABSORPTION; ENERGY ABSORPTION; FOURIER TRANSFORMS; HYDROGEN; IONIZATION; LIGHT ABSORPTION; LIGHT SENSITIVE MATERIALS; NANOCRYSTALLINE ALLOYS; NANOCRYSTALLINE MATERIALS; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; OXIDE FILMS; PHOTOCURRENTS; PHOTOSENSITIVITY; PLASMA DIAGNOSTICS; PLASMAS; SURFACE TREATMENT;

DIAMOND FILMS;

EID: 54249137795     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200879704     Document Type: Conference Paper

References (23)

1. V. Mortel, J. D'Haen, J. Potmesil, R. Kravets, I. Drbohlav, V. Vorlicek, J. Rosa, and M. Vanecek, Diam. Relat. Mater. 14, 393 (2005).
2. S. Potocky, A. Kromka, J. Potmesil, Z. Remes, V. Vorlicek, M. Vanecek, and M. Michalka, Diam. Relat. Mater. 16, 744 (2007).
3. P. Achatz, J. A. Garrido, M. Stutzmann, O. A. Williams, D. M. Gruen, A. Kromka, and D. Steinmüller, Appl. Phys. Lett. 88, 101908 (2006).
4. M. Nesladek, K. Haenen, and M. Vanecek, Thin-film Diamond I, edited by Ch. Nebel and J. Ristein (Elsevier, Amsterdam, 2003), chap. 7, p. 325.
5. J. Rosa, M. Vanecek, M. Nesládek, and L. M. Stals, Diam. Relat. Mater. 8, 721 (1999).
6. R. Kravets, Z. Remes, V. Vorlicek, Z. Bryknar, M. Nesladek, J. Potmesil, A. Poruba, and M. Vanecek, J. Non-Cryst. Solids 352, 1344 (2006).
7. R. Kravets, K. Johnston, J. Potmesil, V. Vorlicek, and M. Vanecek, Diam. Relat. Mater. 15, 559 (2006).
8. Z. Remes, R. Petersen, K. Haenen, M. Nesladek, and M. D'Olieslaeger, Diam. Relat. Mater. 14, 556 (2005).
9. Z. Remes, M. Nesladek, P. Bergonzo, J. Barjon, and F. Jomard, phys. stat. sol. (a) 204, 2950 (2007).
10. Z. Remes, A. Kromka, J. Potmesil, and M. Vanecek, Diam. Relat. Mater., in print.
11. H. G. Grimmeiss and L. A. Ledebo, J. Appl. Phys. 46, 2155 (1975).
12. S. Lee, S. Kumar, C. R. Wronski, and N. Maley, J. Non-Cryst. Solids 114, 316 (1989).
13. W. B. Jackson and N. M. Amer, Phys. Rev. B 25, 5559 (1982).
14. M. Nesladek, K. Meykens, L. M. Stals, M. Vanecek, and J. Rosa, Phys. Rev. B 54, 5552 (1996).
15. A. Kromka, S. Potocky, M. Michalka, J. Potmesil, M. Ledinsky, B. Rezek, and M. Vanecek, presented at Hasselt Diamond Workshop 2008, SBDD XIII, February 25-27, 2008 (Hasselt, Belgium).
16. Sh. Michaelson, Y. Lifshitz, O. Ternyak, R. Akhvlediani, and A. Hoffman, Diam. Relat. Mater. 16, 845 (2007).
17. C. E. Nebel, Semicond. Sci. Technol. 18, S1 (2003).
18. C. E. Nebel, in: Thin-film Diamond I, Semiconductors and Semimetals, Vol. 76, edited by C. E. Nebel and J. Ristein (Elsevier, 2003), p. 261.
19. M. Nesladek, K. Haenen, and M. Vanecek, in: Thin-film Diamond I, Semiconductors and Semimetals, Vol. 76, edited by C. E. Nebel and J. Ristein (Elsevier, 2003), p. 325.
20. K. Hayashi, S. Yamanaka, H. Okushi, and K. Kajimura, Appl. Phys. Lett. 68, 376 (1996).
21. Ch. E. Nebel, Science 318, 1391 (2007).
22. C. E. Nebel, B. Rezek, D. Shin, and H. Watanabe, phys. stat. sol. (a) 203, 3273 (2006).
23. F. De Weerdt and A. T. Collins, Diam. Relat. Mater. 17, 171 (2008).