Acoustic wave manipulation by phased operation of two-dimensionally arrayed nanocrystalline silicon ultrasonic emitters

Japanese Journal of Applied Physics

Volumn 47, Issue 4 PART 2, 2008, Pages 3123-3126

  Gelloz, Bernard ^a   Sugawara, Masahito ^a   Koshida, Nobuyoshi ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

Nanocrystalline silicon; Phased array; Ultrasonic emission; Wave manipulation

Indexed keywords

ACOUSTIC WAVES; ACOUSTICS; ELECTROCHEMICAL ELECTRODES; FREQUENCY RESPONSE; NANOCRYSTALLINE ALLOYS; NANOCRYSTALLINE MATERIALS; NANOSTRUCTURED MATERIALS; POROUS SILICON; SILICON; ULTRASONIC EQUIPMENT; ULTRASONICS;

ACOUSTIC; DEVICE ARRAYS; ELECTROCHEMICAL ANODIZATION; NANOCRYSTALLINE POROUS SILICONS; OPERATING FREQUENCIES; PHASE-SHIFT; PHASED ARRAY; PRACTICAL; SI SUBSTRATES; SOUND WAVES; SPATIAL EMISSIONS; SURFACE ELECTRODES; ULTRASONIC EMISSION; ULTRASONIC EMISSIONS; ULTRASONIC EMITTERS; WAVE MANIPULATION; WAVE MANIPULATIONS;

NANOCRYSTALLINE SILICON;

EID: 54249100508     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.3123     Document Type: Article

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