Radiation heat transfer dominated microbolometers

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Volumn , Issue , 2008, Pages 178-179

  Gawarikar, Anand S ^a   Shea, Ryan P ^a   Mehdaoui, Alexandra ^a   Talghader, Joseph J ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LOWER LIMITS; MICROBOLOMETER; MICROBOLOMETER STRUCTURES; MICROBOLOMETERS; RADIATION HEAT TRANSFERS; THERMAL CONDUCTANCES;

BOLOMETERS; COMPOSITE MICROMECHANICS; HEAT EXCHANGERS; HEAT TRANSFER; HEATING EQUIPMENT; MEMS; PHOTONICS; THERMOANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 54049088253     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2008.4607887     Document Type: Conference Paper

References (4)

1. R. A. Wood, "Monolithic silicon microbolometer arrays," Semiconductors and semimetals, vol. 47, pp. 43-121, 1997.
2. B. E. Cole, R. E. Higashi, and R. A. Wood, "Monolithic two-dimensional arrays of micromachined microstructures for infrared applications," Proceedings of the IEEE, vol. 86, pp. 1679-1686, 1998.
3. P. Eriksson, J. Y. Andersson, and G. Stemme, "Thermal characterization of surface-micromachined silicon nitride membranes for thermal infrared detectors," Microelectromechanical Systems, Journal of, vol. 6, no. 1, pp. 55-61, 1997.
4. Coblentz Society Inc., "Evaluated infrared reference spectra," NIST Chemistry WebBook, NIST Standard Reference Database Number 69, 2005. [Online]. Available: http://webbook.nist.gov/chemistry/