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Volumn 320, Issue 22, 2008, Pages 3104-3107
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Fabrication of CoPt magnetic nanodot arrays by electrodeposition process
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Author keywords
CoPt; Electrodeposition; Electron beam lithography; Nanoimprinting lithography; Patterned media
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Indexed keywords
CHEMICAL MECHANICAL POLISHING;
CHEMICAL POLISHING;
CLARIFICATION;
ELECTRODEPOSITION;
ELECTRON BEAM LITHOGRAPHY;
ELECTRON BEAMS;
NANOPORES;
NANOSTRUCTURED MATERIALS;
REDUCTION;
SPIN GLASS;
SUBSTRATES;
AREA SELECTIVITY;
AREAL RECORDING DENSITY;
COPT;
ELECTRO-CHEMICAL DEPOSITION;
MECHANICAL POLISHING;
NANO-DOT ARRAYS;
NANOIMPRINTING LITHOGRAPHY;
NANOPATTERNED SUBSTRATES;
PATTERNED MEDIA;
PATTERNED MEDIUM;
SPIN-ON GLASS;
UV NANO IMPRINT LITHOGRAPHY;
NANOIMPRINT LITHOGRAPHY;
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EID: 53749100260
PISSN: 03048853
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jmmm.2008.08.022 Document Type: Article |
Times cited : (33)
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References (14)
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