Area selective formation of magnetic nanodot arrays on Si wafer by electroless deposition

Journal of Magnetism and Magnetic Materials

Volumn 287, Issue SPEC. ISS., 2005, Pages 245-249

  Kawaji, J ^a   Kitaizumi, F ^a   Oikawa, H ^a   Niwa, D ^a   Homma, T ^a   Osaka, T ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Area selective formation; CoNiP alloys; Electroless deposition; Patterned media; Pd activation process

Indexed keywords

CHEMICAL ACTIVATION; COBALT COMPOUNDS; ELECTROLESS PLATING; ELECTRON BEAM LITHOGRAPHY; ETCHING; MAGNETIC FIELD EFFECTS; MAGNETIZATION; MONOLAYERS; PALLADIUM; SILICON WAFERS;

AREA SELECTIVE FORMATION; CONIP ALLOYS; PATTERENED MEDIA; PD ACTIVATION PROCESS;

SEMICONDUCTOR QUANTUM DOTS;

EID: 12344284889     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmmm.2004.10.040     Document Type: Conference Paper

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