EBIC imaging using scanning transmission electron microscopy: Experiment and analysis

Journal of Materials Science: Materials in Electronics

Volumn 19, Issue SUPPL. 1, 2008, Pages

  Tanaka, Shigeyasu ^a   Tanaka, Hiroki ^a   Kawasaki, Tadahiro ^a   Ichihashi, Mikio ^a   Tanji, Takayoshi ^a   Arafune, Koji ^b   Ohshita, Yoshio ^b   Yamaguchi, Masafumi ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION EFFECTS; EXPERIMENT AND ANALYSIS; FIELD INDUCED; POLYCRYSTALLINE-SI; SCANNING TRANSMISSION ELECTRON MICROSCOPY; STEM IMAGES; SURFACE EFFECTS;

BIOACTIVITY; CIVIL AVIATION; CONCENTRATION (PROCESS); CRYSTAL GROWTH; ELECTRIC CURRENTS; ELECTRIC FIELD MEASUREMENT; ELECTRIC FIELDS; ELECTRON MICROSCOPES; GRAIN BOUNDARIES; IMAGE ENHANCEMENT; MATERIALS SCIENCE; MICROSCOPIC EXAMINATION; POLYSILICON; SCANNING; SCANNING ELECTRON MICROSCOPY; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

CARRIER CONCENTRATION;

EID: 53649110286     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-008-9653-x     Document Type: Article

References (7)

1. T.G. Sparrow, U. Valdre, Philos. Mag. 36, 1517 (1977)
2. P.M. Petroff, R.A. Logan, A. Savage, Phys. Rev. Lett. 44, 287 (1980)
3. C. Cabanel, J.Y. Laval, J. Appl. Phys. 67, 1425 (1990)
4. C. Cabanel, H. Maya, J.Y. Laval, Philos. Mag. Lett. 79, 55 (1999)
5. K. Arafune, T. Sasaki, F. Wakabayashi, Y. Terada, Y. Ohshita, Physica B 376-377, 236 (2006)
6. C. Donolato, Phys. Stat. Sol. (a) 65, 649 (1981)
7. G.C. Perreault, S.L. Hyland, D.G. Ast, Sol. Energy Mater. Sol. Cells 30, 309 (1993)