Meeting the demands of modern large area glass coating: Latest developments of horizontal and vertical coaters and applications

Thin Solid Films

Volumn 442, Issue 1-2, 2003, Pages 15-20

  Geisler, M ^a   Braatz, Ch ^a   Bruch, J ^a   Kastner, A ^a   Kress, M ^a   Ruske, M ^a   Willms, T ^a   Zmelty, A ^a  

^a Applied Films Corporation GmbH   (Germany)

Author keywords

Optical coatings; Plasma processing and deposition; Sputtering

Indexed keywords

CONTROL SYSTEMS; GLASS; PARTIAL PRESSURE SENSORS; PROCESS CONTROL; SPUTTERING;

GLASS COATINGS;

OPTICAL COATINGS;

EID: 0141525140     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00931-3     Document Type: Conference Paper

References (6)

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2. A. Boozenny, J. Hoog, Patent WO 91/07521, 1990.
3. Szczyrbowski J., Bräuer G., Dicken W., Scherer M., Maaß W., Teschner G., Zmelty A. Surf. Coat. Technol. 93:1997;14-20.
4. S. Schiller, K. Goedicke, V. Kirchhoff, T. Kopte, Soc. Vac. Coaters, 38th Annual and Technical Conference Proceedings, Chicago, 1995, p. 293.
5. Ruske M., Bräuer G., Pistner J., Szczyrbowski J., Zmelty A. Mater. Sci. Forum. 287-288:1998;247-250.
6. Szczyrbowski J., Bräuer G., Ruske M., Teschner G., Zmelty A. J. Non-cryst. Solids. 218:1997;262-266.