Improvement in moisture durability of ZnO transparent conductive films with Ga heavy doping process

Vacuum

Volumn 83, Issue 3, 2008, Pages 544-547

  Kishimoto, Yutaka ^a   Nakagawara, Osamu ^a   Seto, Hiroyuki ^a   Koshido, Yoshihiro ^a   Yoshino, Yukio ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

Crystal structure; Heavy doping process; Moisture resistance; Off axis sputtering; Reliability; Transparent conductive films; ZnO

Indexed keywords

DURABILITY; GALLIUM; MAGNETRON SPUTTERING; MOISTURE; SEMICONDUCTING ZINC COMPOUNDS; ZINC ALLOYS; ZINC OXIDE;

CRYSTAL STRUCTURE; DOPING PROCESS; GA-DOPED ZNO; HEAVY DOPING PROCESS; MOISTURE RESISTANCE; OFF-AXIS; OFF-AXIS SPUTTERING; RELIABILITY; RF-MAGNETRON SPUTTERING; TRANSPARENT CONDUCTIVE FILMS; ZNO;

CONDUCTIVE FILMS;

EID: 52949118086     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.038     Document Type: Article

References (16)

1. Sato H., Minami T., Tanaka S., Mouri T., and Ogawa N. Thin Solid Films 220 (1992) 327
2. Kon M., Song P.K., Mitsui A., and Shigesato Y. Jpn J Appl Phys 41 (2002) 6174
3. Minami T., Nanto H., and Takata S. Jpn J Appl Phys 23 (1984) L280
4. Minami T., Sato H., Nanto H., and Takata S. Jpn J Appl Phys 24 (1985) L781
5. Tsuji T., and Hirohashi M. Appl Surf Sci 157 (2000) 47
6. Agura H., Suzuki A., Matsushita T., Aoki T., and Ouda M. Thin Solid Films 445 (2003) 263
7. Sakemi T., Iwata K., Matsubarara K., Tampo H., Awai K., Yamamoto T., et al. Mat Res Soc Symp Proc 763 (2003) B7.4
8. Minami T., Miyata T., and Yamamoto Y. J Vac Sci Technol A17 (1999) 1822
9. Nakagawara O., Kishimoto Y., Seto H., Koshido Y., Yoshino Y., and Makino T. Appl Phys Lett 89 (2006) 091904
10. Nakagawara O, Kishimoto Y, Seto H. Japanese Patent Application No. 2006-005433, 11 January 2006.
11. Minami T., Nanto H., and Takata S. Appl Phys Lett 41 (1982) 958
12. Umeda K., Takeuchi M., Yamada H., Kubo R., and Yoshino Y. Vacuum 80 (2006) 658
13. Tominaga K., Yuasa T., Kume M., and Tada O. Jpn J Appl Phys 24 (1985) 994
14. Minami T., Suzuki S., and Miyata T. Mat Res Soc Symp Proc 666 (2001) F1.3
15. Pisarkiewicz T., Zakrzewska K., and Leja E. Thin Solid Films 174 (1989) 217
16. Seto J.Y.W. J Appl Phys 46 (1975) 5247