Fabrication and characterization of PZT thin film capacitors for MMIC applications

2006 International RF and Microwave Conference, (RFM) Proceedings

Volumn , Issue , 2006, Pages 177-181

  Mohd Lazim, Nor Fazlina ^a   Awang, Zaiki ^a   Herman, Sukreen Hana ^a   Mohd Nor, Uzer ^a   Osman, Mohd Nizam ^b   Yusof, Ashaari ^b   Dollah, Asban ^b   Yahya, Mohamed Razman ^b   Awang Mat, Abdul Fatah ^b  

^a UNIVERSITI TEKNOLOGI MARA   (Malaysia)

^b UNIVERSITY PUTRA MALAYSIA   (Malaysia)

Author keywords

MMIC capacitors; Thin dielectric films

Indexed keywords

CAPACITANCE; CAPACITORS; DIELECTRIC DEVICES; ELECTRIC EQUIPMENT; ENERGY STORAGE; FILMS; INTEGRATED CIRCUITS; LEAD; MICROWAVE CIRCUITS; MICROWAVE INTEGRATED CIRCUITS; MICROWAVES; OPTICAL DESIGN; PAPER CAPACITORS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; THICK FILMS; THIN FILM CIRCUITS;

INTERNATIONAL (CO); LEAD ZIRCONATE TITANATE (PZT) FILMS; MONOLITHIC MICROWAVE INTEGRATED CIRCUIT (MMIC); PZT THIN FILMS; SIZE REDUCTIONS;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 46249119984     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RFM.2006.331064     Document Type: Conference Paper

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