PZT thin film preparation on Pt/Ti electrode by RF magnetron sputtering

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 1996, Pages 451-454

  Lu, D X ^a   Pun, E Y B ^a   Zhang, Y L ^a   Wong, E M W ^a   Chung, P S ^a   Huang, L B ^a   Lee, Z Y ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRODES; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PERMITTIVITY; POLARIZATION; SUBSTRATES; TITANIUM COMPOUNDS; ZIRCONIUM COMPOUNDS;

LEAD ZIRCONATE TITANATE (PZT);

THIN FILMS;

EID: 0030358607     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)