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Volumn 83, Issue 3, 2008, Pages 618-621
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The effects of plasma pre-treatment and post-treatment on diamond-like carbon films synthesized by RF plasma enhanced chemical vapor deposition
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Author keywords
Diamond like carbon films; Plasma enhanced chemical vapor deposition; Plasma post treatment; Plasma pre treatment
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Indexed keywords
ACETYLENE;
ARGON;
CARBON;
DIAMOND FILMS;
DIAMOND LIKE CARBON FILMS;
DIAMONDS;
ELECTRIC LOAD MANAGEMENT;
FRICTION;
HARDNESS;
HYDROGEN;
INERT GASES;
LIGHTING;
METAL ANALYSIS;
METHANE;
NONMETALS;
PLASMA DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMA THEORY;
PLASMAS;
SURFACE PROPERTIES;
SURFACE ROUGHNESS;
SURFACE TREATMENT;
VAPORS;
WAVE PLASMA INTERACTIONS;
CARBON SOURCES;
DLC FILMS;
FILM SURFACES;
HARDNESS MEASUREMENTS;
HYDROGEN PLASMAS;
PLASMA POST-TREATMENT;
PLASMA PRE-TREATMENT;
POST TREATMENTS;
RAMAN ANALYSIS;
RELATIVELY CONSTANT;
RF PLASMAS;
CARBON FILMS;
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EID: 52949098340
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.vacuum.2008.04.071 Document Type: Article |
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Times cited : (12)
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References (13)
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