Mechanism of surface smoothing of diamond by a hydrogen plasma

Diamond and Related Materials

Volumn 6, Issue 5-7, 1997, Pages 791-795

  Rawles, R E ^a   Komarov, S F ^b   Gat, R ^c   Morris, W G ^d   Hudson, J B ^b   D'Evelyn, M P ^b,d  

^a RICE UNIVERSITY   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^c ASTeX   (United States)

^d GE GLOBAL RESEARCH   (United States)

Author keywords

Diamond; Diffusion (surface); Hydrogen; Plasma

Indexed keywords

EID: 0000174509     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00623-1     Document Type: Article

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