Hollow atomic force microscopy probes for nanoscale dispensing of liquids

Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008

Volumn 3, Issue , 2008, Pages 273-276

  Meister, André ^a   Przybylska, Joanna ^a   Niedermann, Philippe ^a   Santschi, Christian ^a   Heinzelmann, Harry ^a  

^a CSEM   (Switzerland)

Author keywords

AFM; Microarray; Microfluidic spotting; Nanopatterning

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; COMMERCE; DROP FORMATION; DROPS; EXHIBITIONS; FLUID MECHANICS; IMAGING TECHNIQUES; ION BOMBARDMENT; LITHOGRAPHY; MICROFLUIDICS; MICROSCOPIC EXAMINATION; NANOFLUIDICS; NANOSTRUCTURED MATERIALS; OPTICAL DESIGN; PHOTONICS; RESERVOIRS (WATER); SCANNING PROBE MICROSCOPY; TECHNOLOGY;

AFM; CAPILLARY PRESSURES; FOCUS ION BEAMS; FREE END; HOLLOW CORES; MICRO-FLUIDIC CHANNELS; MICROARRAY; MICROFLUIDIC SPOTTING; NANO SCALING; NANOPATTERNING; NANOSCALE DISPENSING; PROBE TIPS; SAMPLE SURFACES; SUB MICRONS; TRADE SHOWS;

NANOTECHNOLOGY;

EID: 52649180489     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. U. Demirci, G.G. Yaralioglu, E. Hsggström and B.T. Khuri-Yakub, IEEE Transactions on Semicond. Manufac., 18, 709, 2005.
2. A. Fang, E. Dujardin and T. Ondarçuhu, Nanolett., 6, 2368, 2006.
3. A. Meister, M. Liley, J. Brugger, R. Pugin and H. Heinzelmann, Appl. Phys. Lett., 85, 6260, 2004.
4. A. Meister, S. Krishnamoorthy, C. Hinderling, R. Pugin and H. Heinzelmann, Microelectron. Eng., 83, 1509, 2006.