Building micro-robots: A path to sub-mm3 autonomous systems

Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008

Volumn 3, Issue , 2008, Pages 174-177

  Reid, J Robert ^a   Vasilyev, Vladimir ^a   Webster, Richard T ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

MEMS; Robotics; Self assembly; Silicon on insulator

Indexed keywords

EXTERNAL ACTUATORS; MEMS; MICRO-ROBOTS; POWER BUDGETING; SELF ASSEMBLY; SILICON-ON-INSULATOR; SPHERICAL ROBOTS; SPHERICAL STRUCTURES; TRADE SHOWS;

ACTUATORS; COMMERCE; ELECTROSTATIC ACTUATORS; EXHIBITIONS; PHOTONICS; ROBOTICS; ROBOTS; TECHNOLOGY;

NANOTECHNOLOGY;

EID: 52649156981     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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2. S. Hollar, A. Flynn, C. Bellow, and K. Pister, "Solar powered 10mg silicon robot," in IEEE International Conference on Micro Electro Mechanical Systems, January 2003, pp. 706-711.
3. J. Reid, V. Bright, and J. Comtois, "Automated assembly of flip-up micromirrors," in Proceedings of International Conference of Solid-State Sensors and Actuators (Transducers 97), vol. 1, June 1997, pp. 347-350.
4. S. C. Goldstein, J. D. Campbell, and T. C. Mowry, "Invisible computing: Programmable matter," Computer, vol. 38, no. 6, pp. 99-101, June 2005.
5. C. Bellow, S. Hollar, and K. Pister, "An SOI process for fabrication of solar cells, transistors and electrostatic actuators," in International conference on solid-state sensors and actuators (Transducers 03), vol. 2, June 2003, pp. 1075-1078.