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Volumn 5, Issue 6, 2008, Pages 1750-1752
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Comparison of deep level incorporation in ammonia and rf-plasma assisted molecular beam epitaxy n-GaN films
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Author keywords
[No Author keywords available]
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Indexed keywords
AMMONIA NITROGEN;
AMMONIA SOURCE;
DEEP LEVEL;
DEEP LEVEL OPTICAL SPECTROSCOPY;
DEEP TRAPS;
DEFECT INCORPORATION;
DLTS;
ENERGY LEVEL;
FLUX RATIO;
GAN FILM;
GROWTH FLUX;
GROWTH OF GAN;
MBE GROWTH;
POTENTIAL DEFECTS;
RF PLASMA;
TRAP CONCENTRATION;
V/III RATIO;
AMMONIA;
CRYSTAL GROWTH;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
DEFECTS;
GALLIUM ALLOYS;
GALLIUM NITRIDE;
MOLECULAR BEAM EPITAXY;
MOLECULAR BEAMS;
NITROGEN PLASMA;
SEMICONDUCTOR QUANTUM WIRES;
SEMICONDUCTOR GROWTH;
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EID: 52349095241
PISSN: 18626351
EISSN: 16101642
Source Type: Journal
DOI: 10.1002/pssc.200778622 Document Type: Conference Paper |
Times cited : (56)
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References (10)
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