Phosphorous doped SOG as a pre-metal-dielectric for sub-50 nm technology nodes

Microelectronic Engineering

Volumn 85, Issue 10, 2008, Pages 2085-2088

  Das, Arabinda ^a   Stavrev, Momtchil ^a   Prenz, Heike ^a   Schardin, Markus ^a   Uhlig, Ines ^a   Graf, Werner ^a   Sperlich, Hans Peter ^a  

^a QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

Author keywords

Phosphor doped spin on; Pre metal dielectrics; Wet cleans

Indexed keywords

METALS; NANOTECHNOLOGY; PHOSPHORUS;

BOROPHOSPHOSILICATE GLASS; MATE RIAL PROPERTIES; PHOSPHOR-DOPED SPIN-ON; PRE-METAL DIELECTRIC; PRE-METAL DIELECTRICS; SPIN-ON; SUB-50 NM; TECHNOLOGY NODES; WEIGHT PERCENT; WET-CLEANS;

CHEMICAL VAPOR DEPOSITION;

EID: 52149112093     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.04.002     Document Type: Article

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