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Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 647-650

A piezoelectric microvalve with integrated sensors for cryogenic applications

(9) Park, Jong M a Brosten, Tyler R b Evans, Allan T a Rasmussen, Kristian b Nellis, Gregory F b Klein, Sanford A b Feller, Jeffrey R c Salerno, Louis c Gianchandani, Yogesh B a

a UNIVERSITY OF MICHIGAN (United States)

b University of Wisconsin Madison (United States)

c NASA AMES RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENICS; MEMS; MODULATION; TEMPERATURE MEASURING INSTRUMENTS;

ACTUATION VOLTAGES; CRYOGENIC APPLICATIONS; EMBEDDED SENSORS; FLOW MODULATIONS; INTEGRATED SENSORS; OPERATING TEMPERATURE; OPERATIONAL RANGE; PRESSURE AND TEMPERATURE;

TEMPERATURE SENSORS;

EID: 52149094768 PISSN: 10846999 EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/memsys.2007.4432991 Document Type: Conference Paper

Times cited : (4)

References (6)

1
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- A Piezoelectrically Actuated Ceramic-Si-Glass Microvalve for Distributed Cooling Systems
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- J.M. Park, R.P. Taylor, A.T. Evans, T.R. Brosten, G.F. Nellis, S.A. Klein, J.R. Feller, L. Salerno, Y.B. Gianchandani, "A Piezoelectrically Actuated Ceramic-Si-Glass Microvalve for Distributed Cooling Systems," Solid-State Sensor and Actuator Workshop, Hilton Head Island, pp. 248-251, 2006
- (2006) Solid-State Sensor and Actuator Workshop , pp. 248-251
- Park, J.M.¹ Taylor, R.P.² Evans, A.T.³ Brosten, T.R.⁴ Nellis, G.F.⁵ Klein, S.A.⁶ Feller, J.R.⁷ Salerno, L.⁸ Gianchandani, Y.B.⁹

2
- 0033741710
- MEMS Micro-valve for Space Applications
- I. Chakraborty, W.C. Tang, D.P. Bame, T.K. Tang, "MEMS Micro-valve for Space Applications," Sensors and Actuators, V. 83, pp. 188-193, 2000
- (2000) Sensors and Actuators , vol.83 , pp. 188-193
- Chakraborty, I.¹ Tang, W.C.² Bame, D.P.³ Tang, T.K.⁴

3
- 0024764864
- Normally Closed Microvalve and Micropump Fabricated on a Silicon Wafer
- M. Esashi, S. Shoji, A. Nakano, "Normally Closed Microvalve and Micropump Fabricated on a Silicon Wafer," Sensors and Actutors, V. 20, pp. 163-169, 1989
- (1989) Sensors and Actutors , vol.20 , pp. 163-169
- Esashi, M.¹ Shoji, S.² Nakano, A.³

4
- 0026374786
- Smallest Dead Volume Microvalves for Integrated Chemical Analyzing Systems
- S. Shoji, B. Schoot, N. Rooij, M. Esashi, "Smallest Dead Volume Microvalves for Integrated Chemical Analyzing Systems," Transducers '91, pp. 1052-1055, 1991
- (1991) Transducers '91 , pp. 1052-1055
- Shoji, S.¹ Schoot, B.² Rooij, N.³ Esashi, M.⁴

5
- 52249088341
- A Piezoelectric Liquid-Compatible Microvalve for Integrated Micropropulsion
- Hilton Head Isl, SC, 6/6-10/04, pp
- C. Lee, E.H. Yang, "A Piezoelectric Liquid-Compatible Microvalve for Integrated Micropropulsion," Technical Digest of the 2004 Solid-State Sensor and Actuator Workshop, Hilton Head Isl., SC, 6/6-10/04, pp. 160-163, 2004
- (2004) Technical Digest of the 2004 Solid-State Sensor and Actuator Workshop , pp. 160-163
- Lee, C.¹ Yang, E.H.²

6
- 33845393685
- Measurements of the Material Properties of a Laminated Piezoelectric Stack at Cryogenic Temperatures
- R.P. Taylor, et al., "Measurements of the Material Properties of a Laminated Piezoelectric Stack at Cryogenic Temperatures," Conference Proceedings of the 2005 International Cryogenic Materials Conference, v. 824, pp. 200-7, 2006
- (2006) Conference Proceedings of the 2005 International Cryogenic Materials Conference , vol.824 , pp. 200-207
- Taylor, R.P.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.