Controlling the formation of nanoparticles for definite growth of carbon nanotubes for interconnect applications

Microelectronic Engineering

Volumn 85, Issue 10, 2008, Pages 1979-1983

  Hermann, Sascha ^a   Ecke, Ramona ^a   Schulz, Stefan ^a   Gessner, Thomas ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Carbon nanotubes; Catalyst; CVD; Interconnect; Ni; Via

Indexed keywords

ARCHITECTURAL ACOUSTICS; CARBON; CARBON FILMS; CATALYSIS; CHEMICAL VAPOR DEPOSITION; ECOLOGY; ELECTRON MICROSCOPES; ETHYLENE; FILM PREPARATION; GASES; HYDROGEN; IMAGING TECHNIQUES; MOLECULAR BEAM EPITAXY; NANOCOMPOSITES; NANOPARTICLES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOTUBES; NICKEL; NITROGEN; NONMETALS; OPTICAL DESIGN; SCANNING; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SYNTHESIS (CHEMICAL); TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE; ULTRATHIN FILMS;

CATALYST; CATALYST PREPARATION; CHEMICAL VAPOUR DEPOSITION; CNT FILMS; CONTACT HOLES; CVD; CVD REACTORS; ELECTRICAL INTERCONNECTS; ELECTRON MICROSCOPY , TRANSMISSION; ELECTRONIC DEVICES; GAS COMPOSITIONS; GROWTH CONDITIONS; INTERCONNECT; INTERCONNECT APPLICATIONS; LAYER THICKNESSES; METALLIZATION; MULTI-WALLED NANOTUBES; NI; NI PARTICLES; NITROGEN GAS FLOW; PARTICLE FORMATIONS; PROCESS CONDITIONS; SCANNING ELECTRON MICROSCOPY (SEM); SELECTIVE GROWTHS; TEST STRUCTURES; THERMAL CVD; VIA;

CARBON NANOTUBES;

EID: 52149090124     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.06.019     Document Type: Article

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