A new class of tunable RF MEMS inductors

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 114-115

  Zine El Abidine, I ^a   Okoniewski, M ^a   McRory, J G ^a  

^a NONE

Author keywords

Actuators; Inductance; Inductors; Micromechanical devices; Q factor; Radio frequency; Radiofrequency microelectromechanical systems; Substrates; Tunable circuits and devices; Voltage controlled oscillators

Indexed keywords

ACTUATORS; CIRCUIT OSCILLATIONS; ELECTRIC INDUCTORS; ELECTROMECHANICAL DEVICES; INDUCTANCE; MEMS; OSCILLATORS (ELECTRONIC); OSCILLISTORS; Q FACTOR MEASUREMENT; SUBSTRATES; VARIABLE FREQUENCY OSCILLATORS;

MICROMECHANICAL DEVICE; Q-FACTORS; RADIO FREQUENCIES; RF-MEMS; THERMAL ACTUATOR; TUNABILITIES; TUNABLE CIRCUITS AND DEVICES; TUNABLE INDUCTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 52049116165     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1221976     Document Type: Conference Paper

References (7)

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