Measurement of surface shape and position by phase-shifting digital holography

Strain

Volumn 44, Issue 5, 2008, Pages 349-356

  Yamaguchi, I ^a   Ida, T ^a   Yokota, M ^a  

^a GUNMA UNIVERSITY   (Japan)

Author keywords

Coherence; Digital holography; Interferometry; Surface position measurement; Surface shape measurement

Indexed keywords

CHARGE COUPLED DEVICES; CHLORINE COMPOUNDS; COMPUTER GENERATED HOLOGRAPHY; DATA RECORDING; DIGITAL ARITHMETIC; HOLOGRAPHIC INTERFEROMETRY; HOLOGRAPHY; IMAGING TECHNIQUES; INTERFEROMETRY; LASER RECORDING; PHOTONICS; PHOTORESISTS; THICKNESS MEASUREMENT;

COHERENCE; COMPLEX AMPLITUDES; COMPLEX COHERENCE FACTOR; DIGITAL HOLOGRAPHY; FRINGE CONTRASTS; MAXIMUM CONTRAST; OBJECT DISTANCE; PEAK POSITIONS; PHASE-SHIFTING DIGITAL HOLOGRAPHY; ROUGH SURFACES; SHAPE MEASUREMENTS; SPECKLE NOISES; SURFACE POSITION MEASUREMENT; SURFACE SHAPE MEASUREMENT; SURFACE SHAPES;

POSITION MEASUREMENT;

EID: 51949087443     PISSN: 00392103     EISSN: 14751305     Source Type: Journal    
DOI: 10.1111/j.1475-1305.2008.00454.x     Document Type: Article

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