|
|
Volumn 17, Issue 3, 2008, Pages
|
|
Deposition of platinum catalyst by plasma sputtering for fuel cells: 3D simulation and experiments
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
ANGULAR DISTRIBUTION;
ARGON;
ATOMIC PHYSICS;
ATOMS;
CATALYSIS;
CATALYSTS;
DEPOSITION RATES;
DIRECT ENERGY CONVERSION;
ELECTRIC BATTERIES;
ELECTROCHEMISTRY;
ELECTRODES;
EXPERIMENTS;
FUEL CELLS;
INERT GASES;
NONMETALS;
PLASMA DEPOSITION;
PLASMAS;
PLATINUM;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SCALE (DEPOSITS);
SILICON;
SOLID OXIDE FUEL CELLS (SOFC);
SPUTTERING;
TARGETS;
THREE DIMENSIONAL;
THREE DIMENSIONAL COMPUTER GRAPHICS;
3-D SIMULATIONS;
ARGON IONS;
ARGON PLASMAS;
CONDENSATION COEFFICIENTS;
DEPOSITION PROCESSING;
EXPERIMENTAL DEPOSITION;
HYBRID MODEL;
INITIAL ENERGY;
LOW PRESSURE;
LOW-TEMPERATURE FUEL CELLS;
MEAN ENERGY;
MONTE CARLO MODELLING;
PLASMA SPUTTERING;
PLATINUM CATALYSTS;
POROUS ELECTRODES;
PT ATOMS;
PT SPUTTERING;
RADIO FREQUENCY PLASMAS;
RUTHERFORD BACK-SCATTERING;
SPUTTERED ATOMS;
SPUTTERED PARTICLES;
TARGET SURFACES;
TARGET-SUBSTRATE DISTANCE;
THOMPSON;
SPUTTER DEPOSITION;
|
|
EID: 51849104504
PISSN: 09630252
EISSN: 13616595
Source Type: Journal
DOI: 10.1088/0963-0252/17/3/035028 Document Type: Article |
|
Times cited : (14)
|
|
References (34)
|
