High brightness extreme ultraviolet (at 13.5 nm) emission from time-of-flight controlled discharges with coaxial fuel injection

Journal of Applied Physics

Volumn 104, Issue 5, 2008, Pages

  Hosokai, Tomonao ^a   Yokoyama, Takuma ^b   Zhidkov, Alexei ^c   Sato, Hiroto ^b   Horioka, Kazuhiko ^a   Hotta, Eiki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b Extreme Ultra Violet Lithography System Development Association   (Japan)

^c CENTRAL RESEARCH INSTITUTE OF ELECTRIC POWER INDUSTRY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; DISCHARGE (FLUID MECHANICS); ELECTRIC DISCHARGES; ENERGY EFFICIENCY; EXTRACTION; FLUID MECHANICS; FULL WIDTH AT HALF MAXIMUM; LASER ABLATION; LASER PULSES; LASERS; LEAKAGE (FLUID); LITHIUM; NEGATIVE IONS; NUCLEAR FUEL REPROCESSING; OPTICAL PROPERTIES; PLASMAS; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; TIN; TITANIUM COMPOUNDS; ULTRAVIOLET DEVICES;

DEPOSITED ENERGY; DISCHARGE CURRENTS; DISCHARGE-PRODUCED PLASMA; DISSIPATED ENERGY; DUTY FACTOR; EUV EMISSIONS; EXTREME ULTRA-VIOLET; EXTREME ULTRAVIOLET EMISSION; FUEL VAPORS; FUEL-INJECTION; HALF CYCLE; HIGH-BRIGHTNESS; PLASMA PARAMETERS; PLASMA PINCHING; RADIATION PULSES; RECOMBINATION RADIATION; TIME -OF-FLIGHT;

PLASMA STABILITY;

EID: 51849097256     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2975994     Document Type: Article

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