Structure and properties of the multilayers produced on Inconel 600 by the PACVD method with the participation of trimethylaluminum vapours

Materials Science- Poland

Volumn 26, Issue 3, 2008, Pages 767-777

  Sitek, R ^a   Sikorski, K ^a   Sobczak, J ^b   Wierzchon T ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b INSTITUTE OF PHYSICAL CHEMISTRY   (Poland)

Author keywords

Inconel 600; Multilayers; PACVD process; XPS

Indexed keywords

INCONEL 600; MULTILAYERS; PACVD PROCESS; STRUCTURE AND PROPERTIES; XPS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 51549091855     PISSN: 01371339     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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