Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 2007, Pages 831-833

  Shimizu, T ^a   Nakada, M ^a   Tsuda, H ^b   Akedo, J ^b   Nishi, K ^a   Ohashi, K ^a  

^a SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LEAD; LIGHT MODULATORS; PIEZOELECTRIC TRANSDUCERS; ZIRCONIUM;

INTERNATIONAL SYMPOSIUM; LEAD ZIRCONATE TITANATE; LSI CHIPS; OPTICAL-;

TECHNICAL PRESENTATIONS;

EID: 51349156316     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAF.2007.4393418     Document Type: Conference Paper

References (9)

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