Chemical and microstructural study in radio frequency sputtered CdTe oxide films prepared at different N2O pressures. Oxygen incorporation and film resputtering

Thin Solid Films

Volumn 516, Issue 23, 2008, Pages 8289-8294

  Caballero Briones, F ^a   Oliva, A I ^b   Bartolo Perez P ^b   Zapata Navarro, A ^a   Pena J L ^b  

^a INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

^b DEPARTAMENTO DE FÍSICA APLICADA   (Mexico)

Author keywords

68.55.Jk; 68.55.Nq; 79.20.Rf; 81.05.Gc; 81.15.Cd; Cadmium telluride; Sputtering; Structural properties; Surface morphology

Indexed keywords

CADMIUM ALLOYS; CADMIUM COMPOUNDS; ELECTROMAGNETIC WAVES;

68.55.JK; 68.55.NQ; 79.20.RF; 81.05.GC; 81.15.CD; CADMIUM TELLURIDE; SPUTTERING; STRUCTURAL PROPERTIES; SURFACE MORPHOLOGY;

OXIDE FILMS;

EID: 51149092076     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.03.024     Document Type: Article

References (27)

1. Espinoza-Beltrán F.J., Sánchez-Sinencio F., Zelaya-Angel O., Mendoza-Alvarez J.G., Alejo-Armenta C., Vázquez-López C., Farías M.H., Soto G., Cota-Araiza L., Peña J.L., Azamar-Barrios J.A., and Baños L. Jpn. J. Appl. Phys. 30 2 (1991) L1715
2. Zapata-Navarro A., Zapata-Torres M., Sosa V., Bartolo-Pérez P., and Peña J.L. J. Vac. Sci. Technol., A 12 (1994) 714
3. Zapata-Navarro A., Bartolo-Pérez P., Zapata-Torres M., Castro-Rodríguez R., and Peña J.L. J. Vac. Sci. Technol., A 15 (1997) 2537
4. Caballero-Briones F., Zapata-Navarro A., Bartolo-Pérez P., Castro-Rodríguez R., Zapata-Torres M., Cauich W., and Peña J.L. Rev. Mex. Fis. S3 (1998) 268
5. Iribarren A., Menéndez-Proupin E., Castro-Rodríguez R., Sosa V., Peña J.L., and Caballero-Briones F. J. Appl. Phys. 86 (1999) 4688
6. Bartolo-Pérez P., Castro-Rodríguez R., Caballero-Briones F., Cauich W., Peña J.L., and Farias M.H. Surf. Coat. Technol. 155 (2002) 16
7. Espinoza-Beltrán F.J., Zelaya-Angel O., Sánchez-Sinencio F., Mendoza-Alvarez J.G., Farías M.H., and Baños L. Braz. J. Phys. 24 (1994) 426
8. El Azhari M.Y., Azizan M., Bennouna A., Outzourhit A., Ameziane E.L., and Brunel M. Sol. Energy Mater. 45 (1997) 341
9. Mohamed T.A., Shaltout I., and Al Yahyaei K.M. Spectrochim. Acta A 64 (2006) 106
10. Mirgorodsky A.P., Merle-Mejean T., Thomas P., Champarnaud-Mesjard J.-C., and Frit B. J. Phys. Chem. Solids 63 (2002) 545
11. Noguera O., Smirnov M., Mirgorodsky A.P., Merle-Mejean T., Thomas P., and Champarnaud-Mesjard J.-C. J. Non-Cryst. Solids 345/346 (2004) 734
12. Wautelet M., Debal F., Dauchot J.P., and Hecq M. J. Vac. Sci. Technol., A 13 (1995) 2600
13. Affinito J., and Parsons R.R. J. Vac. Sci. Technol., A 2 (1984) 1275
14. Berg S., Blom H.-O., Moradi M., Nender C., and Larsson T. J. Vac. Sci. Technol., A 7 (1989) 1225
15. Depla D., and De Gryse R. Surf. Coat. Technol. 183 (2004) 184
16. Acosta M., Ares O., Sosa V., Acosta C., and Peña J.L. J. Vac. Sci. Technol., A 17 5 (1999) 2879
17. Iosad N.N., van der Pers N.M., Grachev S., Zuiddam M., Jackson B.D., Dmitriev P.N., and Klapwijk T.M. IEEE Trans. Appl. Supercond. 13 (2003) 3301
18. Kaltofen R., Sebald T., Schulte J., and Weise G. Thin Solid Films 347 (1999) 31
19. Pekker L. Thin Solid Films 312 (1998) 34
20. Mahieu S., Ghekiere P., Depla D., and De Gryse R. Thin Solid Films 515 (2006) 1229
21. Hecq M., and Hecq A. Thin Solid Films 76 (1981) 35
22. Mysen B., Finger L.W., Virgo D., and Seifer F.A. Am. Mineral. 67 686 (1982)
23. Drinkwine M.J., and Lichtman D. Partial pressure analyzers and analysis. In: Whetten N.R., and Long Jr. R. (Eds). American Vacuum Society Monograph Series (1978), American Vacuum Society, New York
24. Morrison S.R. The Chemical Physics of Surfaces (1978), Plenum Press, New York, USA
25. Kodama C., Orita H., and Nozoye H. Appl. Surf. Sci. 121-122 (1997) 579
26. Zemva P., Lesar A., Kobal I., and Seneganik M. Chem. Phys. 264 (2001) 413
27. Jimenez-Sandoval S., Lopez-Lopez S., Chao B.S., and Melendez-Lira M. Thin Solid Films 342 (1999) 1