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Volumn 202, Issue 22-23, 2008, Pages 5280-5283

Decomposition of PFCs by steam plasma at atmospheric pressure

Author keywords

Perfluorocompounds; Steam plasma; Water plasma

Indexed keywords

DECOMPOSITION PROCESSES; PERFLUOROCOMPOUNDS; STEAM PLASMA; WATER PLASMA;

EID: 50449107983     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.023     Document Type: Article
Times cited : (31)

References (15)
  • 4
    • 0003629160 scopus 로고    scopus 로고
    • Houghton J.T., et al. (Ed), Cambridge University Press, NY
    • In: Houghton J.T., et al. (Ed). The Science of Climate Change (1996), Cambridge University Press, NY
    • (1996) The Science of Climate Change
  • 5
    • 50449105628 scopus 로고    scopus 로고
    • Kyoto Protocol, Climate Change Conference, Kyoto, Japan, Dec. 1-10 (1997).
    • Kyoto Protocol, Climate Change Conference, Kyoto, Japan, Dec. 1-10 (1997).
  • 6
    • 50449099210 scopus 로고    scopus 로고
    • U.S. EPA Memorandum of Understanding for the PFC Emission Reduction Partnership for the Semiconductor Industry.
    • U.S. EPA Memorandum of Understanding for the PFC Emission Reduction Partnership for the Semiconductor Industry.
  • 14
    • 50449095527 scopus 로고    scopus 로고
    • Chemsage, software program, Version 3.2, GTT-Technologies, Germany.
    • Chemsage, software program, Version 3.2, GTT-Technologies, Germany.
  • 15
    • 50449101170 scopus 로고    scopus 로고
    • Park, Dong Wha, Doc, Thesis, Dept. of Chem. Eng., Tokyo Institute of Technology (1988).
    • Park, Dong Wha, Doc, Thesis, Dept. of Chem. Eng., Tokyo Institute of Technology (1988).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.