Towards sub-0.5 angstrom beams through aberration corrected STEM

Institute of Physics Conference Series

Volumn 179, Issue , 2004, Pages 159-164

  Nellist, P D ^a   Dellby, N ^a   Krivanek, O L ^a   Murfitt, M F ^a   Szilagyi, Z ^a   Lupini, A R ^b   Pennycook, S J ^b  

^a Nion Co Kirkland   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGSTROM BEAMS; GAUSSIAN LENS; HIGH-ANGLE ANNULAR DARK FIELD (HAADF); OPTICAL QUALITY;

APPROXIMATION THEORY; COMPUTER SOFTWARE; DATA REDUCTION; MICROSTRUCTURE; OPTICAL DATA PROCESSING; SPECTROMETERS; TRANSMISSION ELECTRON MICROSCOPY; WAVEFRONTS;

ABERRATIONS;

EID: 5044238692     PISSN: 09513248     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Batson P E, Dellby N and Krivanek O L 2002 Nature 418 617-620.
2. Pennycook S J et al. in Spatially Resolved Characterization of Local Phenomena in Materials and Nanostructures, ed. D. A. Bonnell, A. J. Piqueras, P. Shreve, F. Zypman, (Materials Research Society, Warrendale, Pennsylvania, 2003) p. G1.1.
3. Jia C L, Lentzen M and Urban K 2003 Science 299 870-873.
4. Scherzer O 1947 Optik 2 114-132.
5. Krivanek O L, Nellist P D, Dellby N, Murfitt M F and Szilagyi S Z 2003 Ultramicroscopy 96 229-237.
6. Dellby N, Krivanek O L, Nellist P D, Batson P E and Lupini A R 2001 J. Electron. Microsc. 50 177-185.
7. 2 sample.