Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5383-5385

  Bian, Xinchao ^a   Chen, Qiang ^a   Zhang, Yuefei ^a   Sang, Lijun ^a   Tang, Wenjie ^a  

^a BEIJING INSTITUTE OF GRAPHIC COMMUNICATION   (China)

Author keywords

An atmospheric pressure; DBD plasma gun; Nano scale DLC film; OES

Indexed keywords

ATMOSPHERIC PRESSURE; ATMOSPHERIC SPECTRA; ATMOSPHERICS; CLIMATOLOGY; DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; EMISSION SPECTROSCOPY; HEALTH; METEOROLOGY; PLASMA DEPOSITION; PLASMA DIAGNOSTICS; PLASMAS;

AN ATMOSPHERIC PRESSURE; ATMOSPHERIC PRESSURE PLASMA; DBD PLASMA GUN; DILUTED GAS; NANO DIAMONDS; NANO-SCALE DLC FILM; OES; OPTICAL EMISSION SPECTRUM;

CARBON FILMS;

EID: 50349090568     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.143     Document Type: Article

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