Characteristic studies on the Zr-based metallic glass thin film fabricated by magnetron sputtering process

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5564-5566

  Chu, C W ^a   Jang, Jason S C ^a   Chen, G J ^a   Chiu, S M ^b  

^a I SHOU UNIVERSITY   (Taiwan)

^b METAL INDUSTRIES RESEARCH AND DEVELOPMENT CENTRE   (Taiwan)

Author keywords

Amorphous material; Microstructure; Physical vapor deposition (PVD); Thin films

Indexed keywords

ALLOYS; LIQUID METALS; METALLIC GLASS; OPTICAL DESIGN; THICK FILMS; ZIRCONIUM;

AMORPHOUS MATERIAL; MAGNETRON SPUTTERING PROCESS; MICROSTRUCTURE; PHYSICAL VAPOR DEPOSITION (PVD); THIN FILMS;

MAGNETRON SPUTTERING;

EID: 50349090270     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.099     Document Type: Article

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