Micro-forming of thin film metallic glass by local laser heating

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 372-375

  Jeong, Hee Won ^a   Hata, Seiichi ^a   Shimokohbe, Akira ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; LASER BEAM CUTTING; METALLIC FILMS; METALLIC GLASS; METALLOGRAPHIC MICROSTRUCTURE; MICROELECTROMECHANICAL DEVICES; THERMAL EFFECTS; THIN FILM DEVICES; THREE DIMENSIONAL;

LASER HEATING; MICROFORMING SYSTEM; SUPERCOOLED LIQUID REGION; THIN FILM METALLIC GLASS; THREE DIMENSIONAL MICROSTRUCTURE;

MICROELECTRONIC PROCESSING;

EID: 0036118063     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)