|
Volumn 202, Issue 22-23, 2008, Pages 5586-5589
|
Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing
|
Author keywords
C AFM; Cosputtering; Nanocomposite thin films; TaN Ag
|
Indexed keywords
ANNEALING;
EPITAXIAL GROWTH;
FIELD EMISSION;
FILM GROWTH;
IMAGING TECHNIQUES;
NANOCOMPOSITES;
NANOPARTICLES;
NANOSTRUCTURED MATERIALS;
NANOSTRUCTURES;
RAPID THERMAL ANNEALING;
RAPID THERMAL PROCESSING;
SILICON;
TANNING;
TANTALUM COMPOUNDS;
THICK FILMS;
THIN FILMS;
AG NANO-PARTICLES;
AG PARTICLES;
ANTIBACTERIAL PROPERTIES;
C-AFM;
COSPUTTERING;
FIELD-EMISSION SCANNING ELECTRON MICROSCOPY;
FILM SURFACES;
NANO-COMPOSITE FILMS;
NANOCOMPOSITE THIN FILMS;
NUCLEATION AND GROWTH;
REACTIVE CO-SPUTTERING;
TAN-AG;
SILVER;
|
EID: 50349086294
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2008.06.107 Document Type: Article |
Times cited : (53)
|
References (11)
|