A surface micro machined double sided touch mode capacitive pressure sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4601, Issue , 2001, Pages 25-30

  Gaopan, Xu ^a   Guangwen, Chen ^a   Guoqing, Hu ^a  

^a XIAMEN UNIVERSITY   (China)

Author keywords

Design; Double sided touch mode capacitive pressure sensor; Micro machined; Principle

Indexed keywords

CAPACITANCE; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PERMITTIVITY; POISSON RATIO; SENSORS;

DOUBLE SIDED TOUCH MODE CAPACITIVE PRESSURE SENSORS;

MICROMACHINING;

EID: 0035773544     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.444693     Document Type: Article

References (6)

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4. W.H. Ko, Qiang Wan, Touch mode capacitive pressure sensors for industrial applications, Sensors and Actuators (1996).
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