Motorola MEMS switch technology for high frequency applications

2001 Microelectromechanical Systems Conference, MEMS 2001

Volumn , Issue , 2002, Pages 22-24

  De Silva, A P ^a   Vaughan, C ^a   Frear, D ^a   Liu, L ^a   Kuo, S M ^a   Foerstner, J ^a   Drye, J ^a   Abrokwah, J ^a   Hughes, H ^a   Amrine, C ^a   Butler, C ^a   Markgraf, S ^a   Denton, H ^a   Springer, S ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SWITCHES; ELECTROMECHANICAL DEVICES; MEMS; MICROMECHANICS; NEXT GENERATION NETWORKS; SEMICONDUCTOR DIODES; WIRELESS TELECOMMUNICATION SYSTEMS;

HIGH VOLTAGE CHARGE PUMPS; HIGH-FREQUENCY APPLICATIONS; NETWORK SYSTEMS; RF CHARACTERISTICS; RF-MEMS SWITCHES; SEMICONDUCTOR PRODUCTS; WIRELESS APPLICATION; WIRELESS SYSTEMS;

SWITCHING CIRCUITS;

EID: 84963827991     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSC.2001.992733     Document Type: Conference Paper

References (2)

1. C.T.-C. Nguyen, L.P.B. Katehi, G.M. Rebeiz, "Micromachined devices for wireless communications," Proceedings of The IEEE, vol. 86, no. 8, pp. 1756-1768, Aug. 1998.
2. E.R. Brown, "RF-MEMS switches for reconfigurable integrated circuits," IEEE Transactions on Microwave Theory and Techniques, vol. 46, no. 11, pp. 1868-1880, Nov. 1998.