Space-and time-resolved E-H transition in an inductively coupled plasma in Ar

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 1, 2008, Pages 1410-1411

  Hirao, Satoshi ^a   Hayashi, Yuichiro ^a   Makabe, Toshiaki ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

E H transition; Inductively coupled plasmas(ICPs); Optical emission spectroscopy (OES)

Indexed keywords

ARGON; ATOMIC SPECTROSCOPY; CHARGE COUPLED DEVICES; EMISSION SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; INTEGRATED CIRCUITS; MOLECULAR SPECTROSCOPY; PHOTORESISTS; PLASMAS; SIGNAL PROCESSING;

COUPLED PLASMAS; E-H TRANSITION; EMISSION IMAGING; INDUCTIVELY COUPLED PLASMAS(ICPS); INTENSIFIED CHARGE COUPLED DEVICE CAMERA; OPTICAL EMISSION SPECTROSCOPY (OES); PLASMA SCIENCE; TIME-RESOLVED;

OPTICAL EMISSION SPECTROSCOPY;

EID: 50249136694     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.924551     Document Type: Article

References (4)

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3. M. A. Razzak, K. Kondo, Y. Uesugi, N. Ohno, and S. Takamura, "Transition from electrostatic-to-electromagnetic mode in a radio-frequency Ar inductively coupled plasma in atmospheric pressure," J. Appl. Phys., vol. 95, no. 2, pp. 427-433, Jan. 2004.
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