Three-dimensional remarkable images of low-pressure H2 ICP in E-mode

IEEE Transactions on Plasma Science

Volumn 33, Issue 2 I, 2005, Pages 362-363

  Miyoshi, Y ^a   Miyauchi, M ^a   Oguni, A ^a   Makabe, T ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

Computerized tomography; E mode; Hydrogen; Inductively coupled plasma; Optical emission spectroscopy

Indexed keywords

COMPUTERIZED TOMOGRAPHY; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; ELECTRONS; EMISSION SPECTROSCOPY; HYDROGEN;

E-MODE; OPTICAL EMISSION SPECTROSCOPY; RADIO FREQUENCY; STATIC ELECTRIC FIELD;

INDUCTIVELY COUPLED PLASMA;

EID: 18844456821     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.845338     Document Type: Article

References (4)

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2. U. Kortshagen, N. D. Gibson, and J. E. Lawler, "On the E-H mode transition in RF inductive discharges," J. Phys. D, Appl. Phys, vol. 29, pp. 1224-1236, 1996.
3. Y. Miyoshi, Z. Lj. Petrović, and T. Makabe, "Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography," IEEE Trans. Plasma Sci., vol. 30, no. 1, pp. 130-131, Jan. 2002.
4. Y. Miyoshi, Z. Lj. Petrovic, and T. Makabe, "Optical computerized tomography of E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures," J. Phys. D, Appl. Phys., vol. 35, no. 5, pp. 454-461, 2002.