Three-dimensional atom probe investigation of boron distribution in CoFeBMgOCoFeB magnetic tunnel junctions

Applied Physics Letters

Volumn 93, Issue 7, 2008, Pages

  Pinitsoontorn, S ^a,d   Cerezo, A ^a   Petford Long, A K ^b   Mauri, D ^c   Folks, L ^c   Carey, M J ^c  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c SAN JOSE RESEARCH CENTER   (United States)

^d Khon Kaen University   (Thailand)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC PHYSICS; ATOMS; BORON; BORON COMPOUNDS; COBALT COMPOUNDS; MAGNETIC DEVICES; NONMETALS; SEMICONDUCTOR JUNCTIONS; THREE DIMENSIONAL; TUNNEL JUNCTIONS; TUNNELS; WAVEGUIDE JUNCTIONS;

BORON DISTRIBUTION; COMPOSITIONAL VARIATIONS; CRYSTALLINITY; LATERAL VARIATIONS; LENGTH SCALING; MAGNETIC TUNNEL JUNCTIONS; MULTI LAYERING; THREE-DIMENSIONAL ATOM PROBE; UNIFORMLY DISTRIBUTED;

HIGH RESOLUTION ELECTRON MICROSCOPY;

EID: 50249130667     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2973045     Document Type: Article

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