Improvements on an out-of-plane MEMS quadrupole for portable mass spectrometry

Technical Digest of the 20th International Vacuum Nanoelectronics Conference, IVNC 07

Volumn , Issue , 2007, Pages 2-3

  Valasquez Garcia L F ^a   Cheung, K ^a,b   Akinwande, A I ^a,b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b Department of Electrical Engineering and Computer Science   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 50249124452     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IVNC.2007.4480906     Document Type: Conference Paper

References (5)

1. P. Dawson, Quadrupole Mass Spectrometry and Its Applications, American Institute of Physics, 1997.
2. -2 Torr, J. Vac. Sci. Technol., vol A 14 no 3, May/Jun 1996.
3. M. Geear et al. "Monolithic MEMS Quadrupole Mass Spectrometers by Deep Silicon Etching", Journal of MicroElectroMechanical Systems, vol. 14, no. 5, October 2005.
4. L.-Y. Chen, L. F. Velásquez-García, X. Wang, K. Cheung, K. Teo, and A. I. Akinwande "Design, Fabrication and Characterization of Double-Gated Vertically Aligned Carbon Nanofiber Field Emitter Arrays", Technical Digest International Vacuum Nanoelectronics Conference, Chicago, USA July 2007.
5. th International Conference on Solid-state Sensors, Actuators and Microsystems (Transducers' 07), Lyon, France, June 2007.