SCOPUS 정보 검색 플랫폼

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Volumn , Issue , 2006, Pages

Conquering process variability: A key enabler for profitable manufacturing in advanced technology nodes

(1) Strojwas, Andrzej J a,b,c

a CARNEGIE MELLON UNIVERSITY (United States)

b PDF SOLUTIONS INC (United States)

c CARNEGIE MELLON UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE DEVICES; ADVANCED TECHNOLOGIES; CHALLENGING TASK; IN-PROCESS; INTERNATIONAL SYMPOSIUM; PROCESS VARIABILITY; PRODUCT CLASSES; PRODUCT PERFORMANCES; REQUIRED TIME; SEMICONDUCTOR MANUFACTURING; SOURCES OF VARIABILITY; VARIABILITY REDUCTION; VOLUME MANUFACTURING; VOLUME PRODUCTIONS; YIELD LOSSES; YIELD RAMP;

CONCURRENT ENGINEERING; ELECTRIC CONDUCTIVITY; SEMICONDUCTOR MATERIALS;

TECHNOLOGY;

EID: 50249124025 PISSN: 1523553X EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/ISSM.2006.4493000 Document Type: Conference Paper

Times cited : (17)

References (8)

1
- 0035472479
- A New Paradigm for Evaluating IC Yield Loss
- October
- D. Ciplickas, S. Lee and A.J. Strojwas, "A New Paradigm for Evaluating IC Yield Loss", Solid State Technology, October 2001
- (2001) Solid State Technology
- Ciplickas, D.¹ Lee, S.² Strojwas, A.J.³

2
- 3142621461
- Designing for High Product Yield
- October
- D. Ciplickas, A. Joshi, S. Lee and A. J. Strojwas, "Designing for High Product Yield", Semiconductor International, October 2002
- (2002) Semiconductor International
- Ciplickas, D.¹ Joshi, A.² Lee, S.³ Strojwas, A.J.⁴

3
- 50249178699
- J. Kibarian, C. Guardiani and A. J. Strojwas, Proactive DFM for Nanometer SOC Designs, Proc. 2005 ISSCC
- J. Kibarian, C. Guardiani and A. J. Strojwas, "Proactive DFM for Nanometer SOC Designs", Proc. 2005 ISSCC

4
- 50249146974
- Design For Manufacturability
- Chapter 19, CRC Press
- C. Guardiani, N. Dragone and A. J. Strojwas "Design For Manufacturability", Chapter 19, Electronic Design Automation for Integrated Circuits Handbook, CRC Press, 2006.
- (2006) Electronic Design Automation for Integrated Circuits Handbook
- Guardiani, C.¹ Dragone, N.² Strojwas, A.J.³

5
- 33745610764
- Marching to the beat of Moore's Law
- Y. Borodovsky, "Marching to the beat of Moore's Law", SPIE-Microlithography, 2006
- (2006) SPIE-Microlithography
- Borodovsky, Y.¹

6
- 50249177189
- Yield Relevant Statistical Process Control of ULSI Manufacturing
- A. J. Strojwas, "Yield Relevant Statistical Process Control of ULSI Manufacturing", European AEC/APC Conference, 2006
- (2006) European AEC/APC Conference
- Strojwas, A.J.¹

7
- 50249088901
- IEDM
- B. J. Lin, "Lithography for manufacturing sub-65nm nodes and below", IEDM, 2005
- (2005) Lithography for manufacturing sub-65nm nodes and below
- Lin, B.J.¹

8
- 27944451040
- Design Methodology for IC Manufacturability Based on Regular Logic-Bricks
- V. Kheterpal, V. Rovner, T.G. Hersan, D. Motiani, Y Takegawa, L. Pileggi and A. J. Strojwas, "Design Methodology for IC Manufacturability Based on Regular Logic-Bricks", Design Automation Conference, 2005
- (2005) Design Automation Conference
- Kheterpal, V.¹ Rovner, V.² Hersan, T.G.³ Motiani, D.⁴ Takegawa, Y.⁵ Pileggi, L.⁶ Strojwas, A.J.⁷

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