Helicon-type discharge with a flat spiral antenna

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 1, 2008, Pages 1406-1407

  Crintea, Dragon L ^a   Isenberg, Christopher ^a   Luggenhölscher, Dirk ^a   Czarnetzki, Uwe ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Dispersion relation; Electron heating; Helicon discharge; Standing waves

Indexed keywords

ANTENNA ACCESSORIES; DISCHARGE (FLUID MECHANICS); HELICONS; MAGNETIC FIELDS; PLASMA WAVES;

DISPERSION RELATION; ELECTRON HEATING; END POINT; HELICON; HELICON DISCHARGE; LANDAU DAMPING; PLASMA SCIENCE; REFLECTED POWER; RF ANTENNA; SPIRAL ANTENNAS; STANDING WAVES; VELOCITY MATCHING; WHISTLER WAVES;

ANTENNAS;

EID: 50249115157     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.928760     Document Type: Article

References (3)

1. F. F. Chen and R. W. Boswell, "Helicons-The past decade," IEEE Trans. Plasma Sci., vol. 25, no. 6, pp. 1245-1257, Dec. 1997.
2. J. E. Stevans, M. J. Sowa, and J. L. Cecchi, "Helicon plasma source excited by a flat spiral coil," J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 13, no. 5, pp. 2476-2482, Sep. 1995.
3. T. Gans, D. L. Crintea, D. O'Connell, and U. Czarnetzki, "A planar inductively coupled radio-frequency magnetic neutral loop discharge," J. Phys. D, Appl. Phys., vol. 40, no. 15, pp. 4508-4514, Aug. 2007.