Commercialized CMOS compatible micro anemometer

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 1452-1455

  Fang, Yu Jen ^a   Chen, Jen Yi ^a   Lee, Hsin Li ^a   Yen, Kai Hsiang ^a   Wang, Chih Hung ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CONCURRENT ENGINEERING; METEOROLOGICAL INSTRUMENTS; OPTICAL DESIGN; PROCESS ENGINEERING; SENSORS; STANDARDS;

CMOS-COMPATIBLE; FABRICATION STRATEGIES; FLOW SENSORS; HIGH PERFORMANCE CHARACTERISTICS; HONEY WELL; HOT-WIRE ANEMOMETERS; LOW COSTS; POST-CMOS; STANDARD CMOS; STANDARD CMOS PROCESSES; TIME-TO-MARKET;

ANEMOMETERS;

EID: 50149122412     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355907     Document Type: Conference Paper

References (4)

1. J. Laconte, B. Rue, J.P Raskin, and D. Flandre, "Fully CMOS-SOI compatible low-power directional flow sensor", Sensors, 2004.Proceedings of IEEE, 2004, vol.2, p 864 -867
2. E. Yoon and K.D. Wise, "An integrated mass flow sensor with on-chip CMOS interface circuitry", IEEE Trans. Electron Devices 39, 1992, p 1376-1386
3. F. Mayer, A. Haberli, H. Jacobs, G. Ofner, O. Paul, and H. Baltes, "Single-chip CMOS anemometer", International Electron Devices Meeting, Technical Digest, 1997, p 895 - 898
4. R. G.Johnson, and R. E.Higashi, "Highly Sensitive Silicon Chip Microtransducer for Air Flow and Differential Pressure Sensing" Sensors and Actuators, Jan, 1987, vol. 11, No. 1, p 63-72