High-frequency capacitive disk gyroscopes in (100) and (111) silicon

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 47-50

  Johari, Houri ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC MODES; BULK ACOUSTIC WAVE; HIGH FREQUENCIES; HIGH-QUALITY FACTORS; INTERFACE CIRCUITS; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; OPERATING VOLTAGES; SINGLE-CRYSTAL-SILICON; STANDARD CMOS; STATIONARY DEVICES; VIBRATION AMPLITUDES; WAFER-LEVEL PACKAGING;

ACOUSTICS; ATMOSPHERIC PRESSURE; ATMOSPHERICS; COMPOSITE MICROMECHANICS; DISKS (STRUCTURAL COMPONENTS); GYROSCOPES; LOGIC CIRCUITS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; REACTIVE ION ETCHING; SILICON; SINGLE CRYSTALS; STANDARDS;

SILICON WAFERS;

EID: 50149121989     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. M. F. Zaman, et al, "High Performance Matched-Mode Tuning Fork Gyroscope," Proceedings IEEE Conference on MEMS, Jan. 2006, pp. 66-69.
2. F. Ayazi and K. Najafi, "A HARPSS Polysilicon Vibrating Ring Gyroscope," IEEE/ASME JMEMS, June 2001, pp. 169-179.
3. M. F. Zaman, et al, "The Resonating Star Gyroscope," Proceedings IEEE Conference on MEMS, Jan. 2005, pp. 355-358.
4. M. W. Judy, "Evolution of Integrated Inertial MEMS Technology," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head Island, South Carolina, June 2004, pp. 27-32.
5. J. Kim, et al, "Why is (111) Silicon a Better Mechanical Material for MEMS?" Transducers'01, Munich, Germany, Jun. 2001, pp. 662-5.
6. S. Lewis, et al, "Integrated sensor and electronics processing for >108 iMEMS inertial measurement unit components" in Tech. Dig. IEDM 2003, Washington, DC, Dec. 2003, pp. 39.1.1-39.1.4.
7. H. Johari and F. Ayazi, "Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes," in Tech. Dig. IEDM 2006, San Francisco, CA, Dec. 2006.