Explosive micro-bubble actuator

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2441-2444

  Van Den Broek, D M ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Explosive evaporation; Micro bubble actuator

Indexed keywords

EPITAXIAL GROWTH; EXPLOSIVES; FILM GROWTH; MICROSYSTEMS; PRINTERS (COMPUTER); PRINTING PRESSES; SENSORS; TRANSDUCERS;

EXPLOSIVE EVAPORATION; HIGH TEMPERATURE; HOMOGENEOUS NUCLEATION; INK-JET PRINTERS; INTERNATIONAL CONFERENCES; MECHANICAL WORK; MICRO BUBBLE ACTUATOR; MICRO BUBBLES; NUCLEATED BUBBLES; RAPID GROWTH; SHORT TIME; SOLID-STATE SENSORS; THIN LAYERING;

ACTUATORS;

EID: 50049103870     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300664     Document Type: Conference Paper

References (7)

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