Mechanical properties of electroactive polymer microactuators with ion implanted electrodes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6524, Issue , 2007, Pages

  Rosset, Samuel ^a   Niklaus, Muhamed ^a   Dubois, Philippe ^a   Dadras, Massoud ^b   Shea, Herbert R ^a  

^a EPFL   (Switzerland)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Bulge test; Dielectric elastomer actuator; Mechanical properties; Metal ion implantation; PDMS

Indexed keywords

ELASTIC MODULI; ELASTOMERS; ELECTRIC POTENTIAL; ELECTRODES; METAL IONS; POLYDIMETHYLSILOXANE; POLYMERIC MEMBRANES; RESIDUAL STRESSES;

BULGE TEST; DIELECTRIC ELASTOMER ACTUATORS; ELECTROACTIVE POLYMER MICROACTUATORS; METAL ION IMPLANTATION;

ACTUATORS;

EID: 35148845585     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.714944     Document Type: Conference Paper

References (16)

1. S. Ashley, "Artificial muscles," Scientific American 289(4), pp. 52-59, 2003.
2. Y. Bar-Cohen, "Electro-active polymers: Current capabilities and challenges," in Proceedings of SPIE - The International Society for Optical Engineering, 4695, pp. 1-7, 2002.
3. R. E. Pelrine, R. D. Kornbluh, and J. P. Joseph, "Electrostriction of polymer dielectrics with compliant electrodes as a means of actuation," Sensors and Actuators A: Physical 64(1), pp. 77-85, 1998.
4. R. Heydt, R. Kornbluh, R. Pelrine, and V. Mason, "Design and performance of an electrostrictive-polymer-film acoustic actuator," Journal of Sound and Vibration 215(2), pp. 297-311, 1998.
5. S. P. Lacour, H. Prahlad, R. Pelrine, and S. Wagner, "Mechatronic system of dielectric elastomer actuators addressed by thin film photoconductors on plastic," Sensors and Actuators A: Physical 111(2-3), pp. 288-292, 2004.
6. F. Carpi and D. De Rossi, "Dielectric elastomer cylindrical actuators: electromechanical modelling and experimental evaluation," Materials Science and Engineering: C 24(4), pp. 555-562, 2004.
7. A. Pimpin, Y. Suzuki, and N. Kasagi, "Micro electrostrictive actuator with metal compliant electrodes for flow control applications," in Micro Electro Mechanical Systems, 2004- 17th IEEE International Conference on. (MEMS), pp. 478-481, 2004.
8. P. Dubois, S. Rosset, S. Koster, J. Stauffer, S. Mikhailov, M. Dadras, N.-F. d. Rooij, and H. Shea, "Microactuators based on ion implanted dielectric electroactive polymer (eap) membranes," Sensors and Actuators A: Physical 130-131, pp. 147-154, 2006.
9. W. Yuguang, Z. Tonghe, L. Andong, Z. Xu, and Z. Gu, "Properties of implanted pet by w ion using mevva implantation," Vacuum 69(4), pp. 461-466, 2003.
10. M. M. M. Bilek, P. Evans, D. R. Mckenzie, D. G. McCulloch, H. Zreiqat, and C. R. Howlett, "Metal ion implantation using a filtered cathodic vacuum arc," Journal of Applied Physics 87(9), pp. 4198-4204, 2000.
11. J.-P. Salvetat, J.-M. Costantini, F. Brisard, and L. Zuppiroli, "Onset and growth of conduction in polyimide kapton induced by swift heavy-ion irradiation," Physical Review B - Condensed Matter and Materials Physics 55(10), pp. 6238-6248, 1997.
12. W. C. Young, Roark's Formulas for Stress and Strain, McGraw-Hill, New York, 6th ed., 1989.
13. J. J. Vlassak and W. D. Nix, "A new bulge test technique for the determination of young's modulus and poisson's ratio of thin films," Journal of Materials Research 7(12), pp. 3242-3249, 1992.
14. V. Paviot, J. Vlassak, and W. Nix, "Measuring the mechanical properties of thin metal films by means of bulge testing of micromachined windows," in Materials Research Society Symposium - Proceedings, 356, pp. 579-584, 1995.
15. B. E. Alaca, J. C. Selby, M. T. A. Saif, and H. Sehitoglu, "Biaxial testing of nanoscale films on compliant substrates: Fatigue and fracture," Review of Scientific Instruments 73(8), pp. 2963-2970, 2002.
16. J. J. McMahon, Y. Kwon, J. Q. Lu, T. S. Cale, and R. J. Gutmann, "Bonding characterization of oxidized pdms thin films," in Materials Research Society Symposium - Proceedings, 795, pp. 99-104, 2003.