Modeling and control of MEMS with high speed synchronous micromotors and controllers/drivers-on-VLSI-chip ICs

Energy Conversion and Management

Volumn 44, Issue 5, 2003, Pages 667-679

  Lyshevski, Sergey Edward ^a  

^a Rochester Institute of Technology   (United States)

Author keywords

Control; MEMS; Modeling; Synchronous micromotors; VLSI

Indexed keywords

ALGORITHMS; ASPECT RATIO; CMOS INTEGRATED CIRCUITS; DIFFERENTIAL EQUATIONS; ELECTRIC DRIVES; ELECTRIC WINDINGS; HALL EFFECT; MATHEMATICAL MODELS; MICROMACHINING; MICROSENSORS; PERMANENT MAGNETS; SIGNAL PROCESSING; SYNCHRONOUS MOTORS; VLSI CIRCUITS;

MICROMOTOR WINDINGS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037332644     PISSN: 01968904     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0196-8904(02)00076-6     Document Type: Article

References (7)

1. Lyshevski S.E. MEMS and NEMS: structures, devices, and systems. 2002;CRC Press, Boca Raton, FL.
2. Lyshevski S.E. Nano- and microelectromechanical systems: fundamentals of nano- and microengineering. 2000;CRC Press, Boca Raton, FL.
3. Lyshevski S.E. Control systems theory with engineering applications. 2001;Birkhäuser, Boston, MA.
4. Lyshevski S.E. Sliding modes and soft switching control in dynamic systems. Proceedings of American Control Conference, Chicago, IL. 2000;646-650.
5. DeCarlo R.A., Zak S.H., Matthews G.P. Variable structure control of nonlinear multivariable systems: a tutorial. Proc. IEEE. 76(3):1988;212-232.
6. Drakunov S.V., Utkin V.I. Sliding model control in dynamic systems. Int. J. Control. 55(4):1992;1029-1037.
7. Brewer J.W. Kronecker product and matrix calculus in system theory. IEEE Trans. Cir. Syst. 25(9):1978;772-783.