Polysilicon piezoresistive tactile sensor array fabricated by PolyMUMPs process

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 1313-1316

  Lomas, Tanom ^a   Tuantranont, Adisorn ^a   Wisitsoraat, Anurat ^a  

^a NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; EQUIPMENT TESTING; LITHOGRAPHY; NONMETALS; OPTICAL DESIGN; OPTICAL SENSORS; POLYSILICON; SENSOR ARRAYS; SILICON; THICKNESS MEASUREMENT;

LINEAR RESPONSE; MICRO-NEEDLES; MICROMACHINED; NORMAL FORCES; PIEZORESISTIVE; PIEZORESISTIVE LAYER; SENSOR AREA; SENSOR ELEMENTS; SILICON SUBSTRATES; SUSPENDED STRUCTURES; TACTILE SENSOR ARRAY;

SENSORS;

EID: 50149112838     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355871     Document Type: Conference Paper

References (7)

1. B. L. Gray and R. S. Fearing "A surface micromachined microtactile sensor array". Proceedings of IEEE International Conference on Robotics and Automation, Minneapolis, Minnesota, pp. 1-6, 1996.
2. R. H. Liu, L. Wang, and D. J. Beebe "Progress towards a smart skin: fabrication and preliminary testing". Proceedings of International Conference of the IEEE Engineering in Medicine and Biology Society, Vol. 20, No. 4, pp. 1841-1844, 1998.
3. B. J. Kane, M. R. Cutkosky and G. T. A. Kovacs "A traction stress sensor array for use in high-resolution robotic tactile imaging". Journal of Microelectromechanical Systems, Vol. 9, No. 4, pp. 425-434, 2000.
4. G. T. A. Kovacs, Micromachined Transducer Sourcebook, WCB McGraw-Hill, New York, 1998.
5. L. A. Liew, A. Tuantranont, and V. M. Bright "Modeling of thermal actuation in a bulk-micromachined CMOS micromirror". Microelectronics Journal, 31, pp. 791 -801, 2000.
6. D. A. Koester, R. Mahadevan, and K. W. Markus "Multi-user MEMS process (MUMPs): introduction and design rules, rev.4" MCNC MEMS Technical Application Center, Research Triangle Park, NC, 1996.
7. A. Tuantranont, L. A. Liew, V. M. Bright, J. L. Zhang, W. Zhang, and Y. C. Lee "Bulk-etched surface micromachined and flip chip integrated micromirror array for infrared applications". Proceedings of IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, pp. 71-72, 2000.