Highly sensitive sensor for flow velocity and flow direction measurement

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 1436-1439

  Keplinger, Franz ^a   Kuntner, Jochen ^a   Jachimowicz, Artur ^a   Kohl, Franz ^b   Jakoby, Bernhard ^c  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE   (Austria)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; FLOW RATE; FLOW VELOCITY; GERMANIUM; NITRIDES; NONMETALS; SENSORS; SILICON; SILICON NITRIDE; THERMISTORS;

CONSTANT POWER; DIRECTIONAL SENSITIVITY; FLOW DIRECTIONS; GAS-FLOW RATES; HIGH SENSITIVITIES; HIGHLY SENSITIVE; LOW FLOWS; MINIATURIZED SENSORS;

SENSITIVITY ANALYSIS;

EID: 50149107605     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355903     Document Type: Conference Paper

References (7)

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