Batch fabrication of carbon nanotubes on tips of a silicon pyramid array

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 855-858

  Takagahara, Kazuhiko ^a   Takei, Yusuke ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; COMPOSITE MICROMECHANICS; ELECTRIC FIELD EFFECTS; ELECTRIC FIELDS; ELECTROMAGNETIC FIELD THEORY; ELECTROMAGNETIC FIELDS; ELECTRON BEAM LITHOGRAPHY; EXTREME ULTRAVIOLET LITHOGRAPHY; FABRICATION; IMAGING TECHNIQUES; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; NANOTECHNOLOGY; NONMETALS; OPTICAL DESIGN; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON;

ANISOTROPIC WET ETCHING; ARRAY STRUCTURES; ATOMIC FORCE MICROSCOPE; BATCH-FABRICATION; CHEMICAL VAPOR DEPOSITION (CVD); ELECTRIC FIELD SIMULATION; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; ONE-DIMENSIONAL; PYRAMID TIPS; SCANNING ELECTRON MICROSCOPE;

CHEMICAL VAPOR DEPOSITION;

EID: 50149102604     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

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3. M. Shikida, et al., Sensors and Actuators A-Physical, Vol. 116, pp. 264-271, 2004.
4. Y. Murakami, et al., Chemical Physics Letters, Vol. 375, pp. 393-398, 2003.