169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 418-421

  Burger, J ^a   Holland, H ^a   Berenschot, E ^a   Seppenwodde, J H ^a   Ter Brake, M ^a   Gardeniers, H ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CONDENSERS (LIQUEFIERS); COOLING SYSTEMS; CRYOGENIC EQUIPMENT; EVAPORATORS; FLOW CONTROL; GLUING; HEAT EXCHANGERS; MICROMACHINING; TEMPERATURE;

CRYOGENIC MICROCOOLERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035023805     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)