Low power, wide dynamic range carbon nanotube vacuum gauges

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 156-159

  Kaul, A B ^a   Manohara, H M ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; GAGES; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCOMPOSITES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOTUBES; REACTIVE ION ETCHING; THICKNESS MEASUREMENT; VACUUM; VACUUM GAGES;

DYNAMIC RANGE; INTERNATIONAL CONFERENCES; LOW POWERS; MICRO-ELECTRO MECHANICAL SYSTEMS; VACUUM GAUGES; WIDE DYNAMIC RANGE;

CARBON NANOTUBES;

EID: 50149089634     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443616     Document Type: Conference Paper

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